Equipments

Device characterization

  • 4 Optical benches
  • 2 Electromagnets
  • Source Measure Unit
  • 3 Wavelength tunable lasers
  • 3 Optical Power meters
  • 3 Lock-in Amplifiers
  • Optical Spectrum Analyzer
  • Digital Sampling Oscilloscope

Packaging, Microscope

  • Wire bonder
  • High-precision scriber
  • Optical microscopes

Fabrication

  • Electron-beam evaporator
    for Ferromagnetic / nonmagnetc metal, passivation materials
  • Reactive Ion Etching
    for optical waveguides
  • 2 Shared cleanroom
    Photolithograpy, Electron-beam lithograpy, Magnetron Sputtering, Chemical drafts, Scanning Electron Microscope, X-ray Diffractometer
PAGETOP